| Overall Accuracy |
Within
5 um |
| Wafer Size |
4",
4.5", 5",6",8" |
| X/Y axis |
Probing
Area |
±120
mm |
| Maximum
Speed |
200
mm/s |
| Z axis |
Full
Stroke |
34
mm |
| Maximum
Speed |
35ms/0.5mm
Stroke |
| Θ axis |
Rotation
Range |
±5
deg. |
| Fine Alignment |
CCD
ITV Image Processing |
| Loader |
Cassette
Mounts |
1
(2nd cassette with option) |
| Wafer
Handling |
Robot
Arm / Backside Holding |
| Hard Disk |
3.5"
100MB (1 unit standard) |
| Floppy Disk |
3.5"
2HD (1.4M) / 2DD (1 unit standard) |
| Display |
10.4"
TFT Color LCD |
| Power
Consumption |
AC100V±10V
50/60Hz 1.5 kVA |
| Air Supply |
Source
Pressure |
0.4
Mpa or more |
| Consumption |
Approximately
0.1 liters / wafer |
| Vacuum Supply |
Less
than -50 kPa, 30 liter /minute |
| Dimensions |
1090(W)×1100(D)×880(H)
mm |
| Weight |
750
kg (Standard) |
|
| Slot
No |
Board
Name |
| 1 |
MASTER
CPU |
| 2 |
BLANK |
| 3 |
BLANK |
| 4 |
VME-128M |
| 5 |
FDD/SCSI |
| 6 |
BLANK |
| 7 |
ITV(COGNEX) |
| 8 |
PIO |
| 9 |
BLANK |
| 10 |
TTL/GPIB |
| 11 |
PGEN |
| 12 |
GCRTC |
| 13 |
BLANK |
| 14 |
CAP
SENSOR |
| 15 |
BLANK |
| 16 |
SLAVE
CPU |
| 17 |
LOADER
IO |
| 18 |
LOADER
PGEN |
| 19 |
OK |
|
| No |
OPTION |
| 1 |
HOTCHUCK |
| 2 |
OCR |
|
